Electro-optically active device
US11126020B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 11, 2018 |
| Grant date | Sep 21, 2021 |
| Priority date | — |
| Expiry date | May 11, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2202/108
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A silicon based electro-optically active device and method of producing the same. The silicon based electro-optically active device comprising: a silicon-on-insulator (SOI) waveguide; an electro-optically active waveguide including an electro-optically active stack within a cavity of the SOI waveguide; and a lined channel between the electro-optically active stack and the SOI waveguide, the lined channel comprising a liner; wherein the lined channel is filled with a filling material with a refractive index similar to that of a material forming a sidewall of the cavity, to thereby form a bridge-waveguide in the channel between the SOI waveguide and the electro-optically active stack.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.