Display device and manufacturing method thereof
US11127807B2 · kind B2 · utility
1Cited by
12References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 24, 2019 |
| Grant date | Sep 21, 2021 |
| Priority date | — |
| Expiry date | Jul 30, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K2102/341
Abstract
An manufacturing method of a display device may include the following steps: forming a transistor on a substrate; forming an insulating layer on the transistor; forming a conductive layer including silver on the insulating layer; forming a photosensitive member on the conductive layer; forming an electrode of a light-emitting element by etching the conductive layer; performing plasma treatment on a structure that comprises the electrode, the plasma treatment using a gas including a halogen; and removing a product that is resulted from the plasma treatment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.