Method for determining probe angle, high-frequency test system, program and storage medium
US11131699B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 7, 2018 |
| Grant date | Sep 28, 2021 |
| Priority date | — |
| Expiry date | Sep 7, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/28
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method that includes changing a probe angle with respect to the conductor surface of a substrate that has a flat conductor surface mounted on the mounting surface of a stage in a high-frequency test system, thereby changing the state of contact of the tip of a signal terminal and tip of a ground terminal with the conductor surface, outputting high-frequency signals from the signal terminal to the conductor surface and receiving reflected signals using the probe to find S-parameters at different probe angles, and determining, based on a plurality of the S-parameters, a reference probe angle at which the reference line formed connecting the tip of the signal terminal and tip of the ground terminal is parallel with the conductor surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.