Electron beam vaporizer and method for vaporizing a vaporization material by means of an electron beam
US11133154B2 · kind B2 · utility
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3References
20Claims
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Inventor
Key dates
| Filing date | Apr 10, 2019 |
| Grant date | Sep 28, 2021 |
| Priority date | — |
| Expiry date | Sep 4, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3132
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
According to various embodiments, a method for vaporizing a vaporization material by means of an electron beam may include the following: generating a first deflection pattern having a first power density at least on an end face of a rod-shaped vaporization material; and, subsequently, generating a second deflection pattern having a second power density on a portion of an outer edge of the rod-shaped vaporization material and a portion of an inner edge of a ring crucible, which encloses the rod-shaped vaporization material, wherein the second power density is greater than the first power density.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.