Patent · US Active

Method for measuring a behavior of a MEMS device

US11137253B2 · kind B2 · utility

0Cited by

23References

14Claims

0Family size

Assignee

TDK CORPORATION · JP

Inventors

Andreas Barbul · Munich, DE
Wolfgang Pahl · Munich, DE

Key dates

Filing date	Jul 10, 2018
Grant date	Oct 5, 2021
Priority date	—
Expiry date	Sep 1, 2038

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2201/0242
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method for measuring a behavior of a MEMS device is disclosed. In an embodiment a method includes mounting the MEMS device to a testing apparatus that comprises a vibration source, wherein the MEMS device comprises a 6-axis or 9-axis inertial sensor, applying a vibration to the MEMS device by the vibration source and simultaneously moving the testing apparatus according to a predefined movement pattern, reading output data provided by the inertial sensor and comparing the output data to the predefined movement pattern and/or reading output data provided by the inertial sensor and calculating a frequency response curve of the inertial sensor.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.