High sensitivity pressure sensor package
US11137308B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 2, 2019 |
| Grant date | Oct 5, 2021 |
| Priority date | — |
| Expiry date | Aug 10, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0645
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensing package includes a sensor chamber and an annular chamber extending about the sensor chamber. A primary diaphragm divides the sensor chamber into a first part receiving a first pressure and a second part including a differential pressure sensor approximately centered with respect to a sensor axis and a first transmission fluid. The first transmission fluid transmits the first pressure to a first differential pressure sensor face. A secondary diaphragm divides the annular chamber into a first part receiving a second pressure and a second part including a second transmission fluid. The second pressure is transmitted to a second pressure sensor face via the secondary diaphragm and the second transmission fluid. The primary and secondary diaphragms are positioned with respect to one another along the sensor axis direction such that pressures other than the first and second pressures acting on the pressure sensor sum to approximately zero.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.