Tunable optical device
US11137590B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 11, 2016 |
| Grant date | Oct 5, 2021 |
| Priority date | — |
| Expiry date | Oct 6, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/00
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A tunable optical device including a substrate, at least one support unit, a flexible frame, an elastic component, a first reflector, and at least one actuator is provided. The support unit is fixed onto the substrate. The flexible frame is connected to the support unit and suspended above the substrate. The elastic component is connected to the flexible frame. A stiffness of the elastic component in the Z-axis is smaller than a stiffness of the flexible frame in the Z-axis. The Z-axis direction is parallel to a normal direction of the substrate. The first reflector is connected to the elastic component. The actuator is located between the flexible frame and the substrate or located between the first reflector and the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.