Interferometric waviness detection systems
US11143503B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 17, 2018 |
| Grant date | Oct 12, 2021 |
| Priority date | — |
| Expiry date | Feb 4, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/283
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An interferometer detection system, including a beam splitter receiving a collimated light signal and splitting the signal into a first light signal and a second light signal. The system includes a first mirror receiving and reflecting the first light signal along a first path. The system includes a second mirror receiving and reflecting the second light signal along a second path via a transparent material. The system includes a 2D photosensor array configured to receive from the beam splitter the reflected first light signal merged with the reflected second light signal double passing through the transparent material and configured to generate an interference fringe pattern. A non-sinusoidal interference fringe pattern indicates geometrical variation between a wavefront of the reflected first light signal along the first path and a wavefront of the reflected second light signal double passing through the transparent material along the second path.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.