Passive microphone/pressure sensor using a piezoelectric diaphragm
US11143561B2 · kind B2 · utility
52Cited by
5References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 25, 2019 |
| Grant date | Oct 12, 2021 |
| Priority date | — |
| Expiry date | May 5, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R3/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There are disclosed pressure-sensitive acoustic resonators and remote pressure sensing systems and methods. A pressure-sensitive acoustic resonator includes a conductor pattern formed on a planar surface of a dielectric substrate, the conductor pattern including an interdigital conductor pattern (ICP), and a diaphragm, the diaphragm being a portion of a plate of single-crystal piezoelectric material, the diaphragm having a front surface exposed to an environment and a back surface facing, but not contacting, the ICP.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.