Device for detecting a pressure of a fluid medium and method for manufacturing the device
US11143562B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 7, 2016 |
| Grant date | Oct 12, 2021 |
| Priority date | — |
| Expiry date | Apr 7, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/8592
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A device for detecting a pressure of a fluid medium is described. The device includes at least one housing having at least two pressure feeds; at least one sensor module, the sensor module being accommodated in the housing, the sensor module including at least one support element, the support element including at least one substrate and at least one molding compound, the support element further including at least one passage opening, the passage opening entirely penetrating the support element; at least one pressure sensor element for detecting the pressure, the pressure sensor element including at least one diaphragm, the pressure sensor element covering the passage opening; at least one control and evaluation unit, the control and evaluation unit being at least partially enclosed by the molding compound. A method for manufacturing the device is also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.