Sensing an ICMFB output to detect functional state of a MEMS sensor
US11143670B2 · kind B2 · utility
1Cited by
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9Claims
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Key dates
| Filing date | May 18, 2017 |
| Grant date | Oct 12, 2021 |
| Priority date | — |
| Expiry date | Oct 19, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2829
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In one embodiment, a method for detecting functional state of a microelectromechanical (MEMS) sensor is described. The method includes monitoring an input common-mode feedback (ICMFB) voltage generated by an ICMFB circuit coupled to the MEMS sensor through a plurality of nodes. The method also includes determining, using the monitored ICMFB voltage, whether all of the plurality of nodes of the MEMS sensor are electrically connected to the ICMFB circuit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.