Target for a radiation source, radiation source for generating invasive electromagnetic radiation, method of operating a radiation source, and method for producing a target for a radiation source
US11145482B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 27, 2020 |
| Grant date | Oct 12, 2021 |
| Priority date | — |
| Expiry date | Jul 27, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2235/1204
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A target for a radiation source of invasive electromagnetic radiation has at least one target element, which is configured to generate invasive electromagnetic radiation when irradiated with particles and is coupled to a substrate arrangement for dissipating heat out of the target element, wherein: the target element has a peripheral surface which forms a first part of the outer surface of the target element; the outer surface of the target element is also formed by a side surface of the target element; an extension of the side surface defines a thickness (D) of the target element; a peripheral line of the side surface forms a borderline of the peripheral surface; the target has an end face, as part whereof the side surface of the target element is exposed for irradiation with particles; and the substrate arrangement is in contact with the peripheral surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.