Solidly-mounted transversely-excited film bulk acoustic resonator with recessed interdigital transducer fingers
US11146231B2 · kind B2 · utility
54Cited by
14References
36Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 17, 2020 |
| Grant date | Oct 12, 2021 |
| Priority date | — |
| Expiry date | Aug 17, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/54
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Acoustic resonator devices, filters, and methods are disclosed. An acoustic resonator includes a substrate, a piezoelectric plate having front and back surfaces, and an acoustic Bragg reflector between a surface of the substrate and the back surface of the piezoelectric plate. An interdigital transducer (IDT) is formed on the front surface of the piezoelectric plate. The IDT is configured to excite a shear primary acoustic mode in the piezoelectric plate in response to a radio frequency signal applied to the IDT. At least one finger of the IDT is disposed in a groove in the piezoelectric plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.