Patent · US Active

Full symmetric multi-throw switch using conformal pinched through via

US11148935B2 · kind B2 · utility

1Cited by
10References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 22, 2019
Grant dateOct 19, 2021
Priority date
Expiry dateFeb 22, 2039

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB81C2203/0145
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

A hermetically sealed component may comprise a glass substrate, a device with at least one electrical port associated with the glass substrate, and a glass cap. The glass cap may have at least one side wall. The glass cap may have a shaped void extending therethrough, from top surface of the glass cap to bottom surface of glass pillar. An electrically conductive plug may be disposed within the void, the plug configured to hermetically seal the void. The electrically conductive plug may be electrically coupled to the electrical port. The glass cap may be disposed on the glass substrate, with the at least one side wall disposed therebetween, to form a cavity encompassing the device. The side wall may contact the glass substrate and the glass cap to provide a hermetic seal, such that a first environment within the cavity is isolated from a second environment external to the cavity.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.