Sapphire sensor for measuring pressure and temperature with improved stress and temperature variation compensation
US11150144B2 · kind B2 · utility
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19Claims
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Key dates
| Filing date | Nov 13, 2019 |
| Grant date | Oct 19, 2021 |
| Priority date | — |
| Expiry date | Mar 13, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/0092
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for measuring pressure, temperature or both includes a diaphragm that responds to a change in temperature or pressure, and a base connected to the diaphragm that has a sapphire element. Between the diaphragm and the base is a cavity. An optical fiber that conducts light reflected off of a surface of the diaphragm is adjacent the cavity. An interrogator is used for detecting a deflection of the diaphragm based on at least two reflected light signals having similar wavelengths and coherence lengths. A quadrature phase detection unit demodulates signals received by the interrogator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.