Patent · US Active

Optical diffuser and its method of manufacture

US11150388B2 · kind B2 · utility

5Cited by
2References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 31, 2017
Grant dateOct 19, 2021
Priority date
Expiry dateDec 26, 2039

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B5/0268
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

Methods of manufacture of an optical diffuser. In one embodiment, an optical diffuser is formed by providing a wafer including a silicon slice of which an upper face is covered with a first layer made of a first material itself covered with a second layer made of a second selectively etchable material with respect to the first material. The method further includes forming openings in the second layer extending up to the first layer and filling the openings in the second layer with a third material. The method yet further includes bonding a glass substrate to the wafer on the side of its upper face and removing the silicon slice.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.