Scanning device for scanning an object for use in a scanning microscope
US11150453B2 · kind B2 · utility
0Cited by
7References
17Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 23, 2016 |
| Grant date | Oct 19, 2021 |
| Priority date | — |
| Expiry date | Feb 26, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/642
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A scanning device for scanning an object in a scanning microscope includes at least one scanning unit configured to two-dimensionally scan the object using a light beam. The scanning unit includes at least one deflection element configured to deflect a light beam impinging thereon. The deflection element is rotationally symmetric in shape. At least one rotation device is configured to rotate the scanning unit about an axis of rotation so as to allow for image field rotation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.