Optical scanning device and method of adjusting optical scanning device
US11150464B2 · kind B2 · utility
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18Claims
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Key dates
| Filing date | Mar 16, 2018 |
| Grant date | Oct 19, 2021 |
| Priority date | — |
| Expiry date | Jun 19, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/101
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical scanning device includes a mirror part having a mirror surface configured to reflect light, N support cantilevers supporting the mirror part swingably, N drive cantilevers, and a plurality of driving piezoelectric elements secured on N drive cantilevers. The mirror part precesses by setting the frequency of AC voltage applied to each of a plurality of piezoelectric elements to a determined common value and setting the phase of AC voltage applied to each of a plurality of piezoelectric elements to a value determined according to the position of each piezoelectric element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.