Piezoelectric element, ultrasonic sensor, discharging head, ultrasonic device, liquid discharging device, and method of manufacturing piezoelectric element
US11152559B2 · kind B2 · utility
1Cited by
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8Claims
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Key dates
| Filing date | Mar 20, 2018 |
| Grant date | Oct 19, 2021 |
| Priority date | — |
| Expiry date | Mar 7, 2040 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2002/14419
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A supporting film is provided on an opening and a wall of a substrate. A piezoelectric film is provided on a first region of the supporting film corresponding to the opening and a second region of the supporting film corresponding to the wall. The thickness of the piezoelectric film at the second region is smaller than that of the piezoelectric film provided at the first region. Therefore, vibration of the piezoelectric film in the first region is large, and vibration of the piezoelectric film in the second region is small. This alleviates disadvantages such as a loss of the vibration characteristics of a piezoelectric element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.