Evaporation mask plate, manufacturing method thereof and evaporation method
US11155913B2 · kind B2 · utility
1Cited by
0References
8Claims
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Key dates
| Filing date | Aug 3, 2017 |
| Grant date | Oct 26, 2021 |
| Priority date | — |
| Expiry date | Nov 4, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/00
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An evaporation mask plate, a manufacturing method thereof and an evaporation method are provided. The evaporation mask plate includes a body, a plurality of evaporation cutout regions formed in the body, and a plurality of shielding members arranged on the body. Each shielding member is arranged between two adjacent evaporation cutout regions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.