Microelectromechanical or/and nanoelectromechanical device with out-of-plane displacement having capacitive elements having a variable surface
US11156459B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 16, 2017 |
| Grant date | Oct 26, 2021 |
| Priority date | — |
| Expiry date | Aug 28, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0822
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Microelectromechanical sensor comprising a fixed part and a mobile part suspended from the fixed part such that the mobile part can move at least in an out-of-plane displacement direction, the fixed part comprising at least first electrodes extending parallel to the displacement direction of the mobile part, the mobile part comprising a seismic mass and at least second electrodes extending parallel to the out-of-plane displacement direction, the first electrodes and the second electrodes being located relative to each other so as to be interdigitated, in which the second electrodes are directly connected to the inertial mass and only part of the face of each mobile electrode is facing an electrode fixed at rest.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.