Method and sensor system for measuring gas concentrations
US11156577B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 16, 2019 |
| Grant date | Oct 26, 2021 |
| Priority date | — |
| Expiry date | May 16, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N33/0016
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In an embodiment a sensor system includes a carrier implemented as one of a ceramic carrier, a printed circuit board or a transistor outline header, a measuring area semiconductor body implemented as a first micromechanical component, a gas sensor implemented as a second micromechanical component and including an electrode assembly, a sensitive layer and a sensor membrane that spans a recess, wherein the measuring area semiconductor body and the gas sensor are connected to each other, a further sensor with a further electrode assembly and a further sensitive layer, wherein the further sensor is a further gas sensor or a humidity sensor, and a measuring area filled by the gas sample and arranged between the measuring area semiconductor body and the gas sensor, wherein the gas in the measuring area is in contact with the gas sensor and the further sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.