Patent · US Active

Electrode structure and method of manufacturing an electrode structure

US11156579B2 · kind B2 · utility

0Cited by

3References

12Claims

0Family size

Assignees

Albert-Ludwigs-Universitaet Freiburg · DE
Fachhochschule Vorarlberg GmbH · AT

Inventors

Stefan Partel · Bildstein, AT
Stephan Kasemann · Feldkirch, AT
Can Dincer · London, GB
Jochen Kieninger · Denzlingen, DE
Gerald Urban · Neuzelle, DE

Key dates

Filing date	Dec 19, 2017
Grant date	Oct 26, 2021
Priority date	—
Expiry date	May 11, 2039

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/16
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method of manufacturing an electrode structure includes providing an initial structure, the initial structure including at least two elevated regions extending from a substrate, wherein top portions of the two elevated regions are separated by a first lateral distance, depositing material onto the elevated regions by means of physical vapor deposition such that adjacent top portions of the deposited material are separated by a second lateral distance that is smaller than the first lateral distance, and applying electrodes onto the top portions of the material.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.