Measuring device for a scanning probe microscope and method for scanning probe microscopy of a measurement sample by means of a scanning probe microscope

US11156632B2 · kind B2 · utility

Assignee

• Bruker Nano, Inc. · US

Inventors

• Detlef Knebel · Berlin, DE
• Tilo Jankowski · Berlin, DE
• Frederik Büchau · Berlin, DE

Key dates

• Filing date: Jun 17, 2020
• Grant date: Oct 26, 2021
• Expiry date: Jun 17, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G01Q10/065
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A measuring device for a scanning probe microscope including a sample receptacle configured to receive a sample; a measuring probe which is arranged on a probe holder and has a probe tip; a displacement device which moves the measuring probe and the sample receptacle relative to each other; a control device which is connected to the displacement device and controls the relative movement between the measuring probe and the sample receptacle; and a sensor device which is configured to detect, movement measurement signals during an absolute measurement for a movement of the measuring probe and/or a movement of the sample receptacle. The movement measurement signals are relayed to the control device. The control device is configured to control the relative movement. The invention also provides a scanning probe microscope, as well as a method for examining a sample.