Patent · US Active

MEMS probe card assembly having decoupled electrical and mechanical probe connections

US11156640B2 · kind B2 · utility

0Cited by
5References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 30, 2018
Grant dateOct 26, 2021
Priority date—
Expiry dateOct 30, 2038

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R1/06744
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Probes are connected to the space transformer via multiple carrier plates. Electrical contacts from the probes to the space transformer are by way of spring tail features on the probes that connect to the space transformer and not to the carrier plates. In other words, the carrier plates are purely mechanical in function. This configuration can significantly reduce probe array fabrication time relative to sequential placement of individual probes on the space transformer. Multiple probe carrier plates can be populated with probes in parallel, and the final sequential assembly of carrier plates onto the space transformer has a greatly reduced operation count. Deviations of the space transformer from flatness can be compensated for.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.