Evaluating quality of a product such as a semiconductor substrate
US11157797B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 17, 2017 |
| Grant date | Oct 26, 2021 |
| Priority date | — |
| Expiry date | Oct 24, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An evaluation device may include: a receiving unit that receives an image of the semiconductor substrate, the image captured by an imaging device provided on the semiconductor substrate manufacturing apparatus; a determination unit that determines, using a neural network, at least one value representative of a probability of a machine learning device outputting an erroneous output for the image, the machine learning device configured to: (i) receive the image of the semiconductor substrate, (ii) perform computation using the received image, and (iii) output information indicating the quality of the semiconductor substrate based on a result of the computation; and an output unit that outputs an output based on the at least one value representative of the probability. The neural network has been trained using: images of manufactured semiconductor substrates; and information indicating, for each one of the images, a level of erroneousness for an output from the machine learning device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.