Patent · US Active

Plasma device consumable part change detection

US11160157B2 · kind B2 · utility

0Cited by
11References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 10, 2019
Grant dateOct 26, 2021
Priority date
Expiry dateJul 24, 2039

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB23K10/006
  • WIPO fieldMachine tools
  • WIPO sectorMechanical engineering

Abstract

Approaches herein provide a system for determining whether one or more consumable parts of a plasma device has been removed or replaced while the plasma device and associated sensors lie dormant or are no longer receiving data, e.g., when the plasma device is power-off. The approaches herein determine whether certain types of data stored in a controller's memory are still valid, for example, for the purposes of determining degradation and/or end-of-life of the consumable parts. In the case that one or more consumable parts has been serviced or replaced, the data stored in the controller memory may no longer be considered valid for the consumable part(s). In one approach, the controller determines a status of a switch or a conformal film in the device following start-up, and determines, based on the position of the switch or the conformal film, whether the consumable part has been removed or replaced.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.