Plasma device consumable part change detection
US11160157B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 10, 2019 |
| Grant date | Oct 26, 2021 |
| Priority date | — |
| Expiry date | Jul 24, 2039 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K10/006
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
Approaches herein provide a system for determining whether one or more consumable parts of a plasma device has been removed or replaced while the plasma device and associated sensors lie dormant or are no longer receiving data, e.g., when the plasma device is power-off. The approaches herein determine whether certain types of data stored in a controller's memory are still valid, for example, for the purposes of determining degradation and/or end-of-life of the consumable parts. In the case that one or more consumable parts has been serviced or replaced, the data stored in the controller memory may no longer be considered valid for the consumable part(s). In one approach, the controller determines a status of a switch or a conformal film in the device following start-up, and determines, based on the position of the switch or the conformal film, whether the consumable part has been removed or replaced.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.