MEMS gyroscope start-up process and circuit
US11162790B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 26, 2019 |
| Grant date | Nov 2, 2021 |
| Priority date | — |
| Expiry date | Oct 1, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5649
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A drive signal is applied to a MEMS gyroscope having several intrinsic resonant modes. Frequency and amplitude of mechanical oscillation in response to the drive signal is sensed. At startup, the drive signal frequency is set to a kicking frequency offset from a resonant frequency corresponding to a desired one of the intrinsic resonant modes. In response to sufficient sensed amplitude of mechanical oscillation at the kicking frequency, a frequency tracking process is engaged to control the frequency for the drive signal to sustain mechanical oscillation at the frequency of the desired one of the plurality of intrinsic resonant modes as the oscillation amplitude increases. When the increasing amplitude of the mechanical oscillation exceeds a threshold, a gain control process is used to exercise gain control over the applied drive signal so as to cause the amplitude of mechanical oscillation to match a further threshold. At that point start-up terminates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.