Particle detection system and method
US11162879B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 24, 2018 |
| Grant date | Nov 2, 2021 |
| Priority date | — |
| Expiry date | May 25, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2015/0681
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A particle detector for rapidly detecting and identifying sub 20 nm particles in Ultra Pure Water (UPW) is disclosed. The detector has a nano particle extractor, a nanoparticle collector, and a tracer particle introducer. The extractor limits the size of droplets output to a predetermined size. The extractor includes (1) a liquid sample inlet, (2) a nebulizer connected to the liquid sample inlet (the nebulizer has a gas supply, and an outlet), (3) an impactor arranged to receive material output from the nebulizer, (4) an evaporator connected to the nebulizer and impactor for providing an aerosol at the extractor outlet, and (5) an aerosol connected to the evaporator. The collector us connected to the extractor and has: (1) a collector inlet connected to the aerosol outlet of the extractor, (2) a vapor condensation growth tube connected to the collector inlet, and (3) a repositionable particle capture plate arranged to receive material output from the growth tube at spatially varying positions. The tracer particle introducer is connected to the liquid sample inlet of the extractor. It includes a tracer particle supply connected to a pump which is connected to the extractor. A method…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.