Coaxial via arrangement in probe card for automated test equipment
US11162980B2 · kind B2 · utility
0Cited by
2References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 24, 2019 |
| Grant date | Nov 2, 2021 |
| Priority date | — |
| Expiry date | Feb 26, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/0491
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe card in an automated test equipment (ATE) is disclosed. The probe card may be a portion of a vertical-type probe card assembly in which pads on a circuit board are contacted by probe pins, with vertical vias in the circuit board interconnecting various conductive elements. Disclosed herein is a probe card having ground vias in a coaxial arrangement around a signal via that provide electromagnetic shielding to a signal via to reduce crosstalk between adjacent signal vias.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.