Optical coupler for heterogeneous integration
US11163115B1 · kind B1 · utility
4Cited by
6References
19Claims
0Family size
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Key dates
| Filing date | Jun 16, 2020 |
| Grant date | Nov 2, 2021 |
| Priority date | — |
| Expiry date | Jul 23, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12121
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In an optical apparatus, an introduced semiconductor device is heterointegrated on a silicon-based platform containing a silicon-based waveguide. A polymeric waveguide is optically coupled to the introduced semiconductor device and overlies at least a portion of the silicon-based waveguide. The polymeric waveguide is conformed as a multimode interference (MMI) coupler between the introduced semiconductor device and the silicon-based waveguide. At least the polymeric waveguide, and in embodiments, also the silicon-based waveguide, is tapered with a shape that effectuates optical coupling to the silicon-based waveguide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.