Vapor delivery container with flow distributor
US11166441B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 28, 2019 |
| Grant date | Nov 9, 2021 |
| Priority date | — |
| Expiry date | Nov 23, 2039 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65D2251/20
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A chemical precursor container is disclosed. The container includes a vessel and a lid that define an interior volume, an inlet conduit, an outlet conduit, and a flow distributor positioned inside the vessel and in fluid flow communication with the inlet conduit. The flow distributor has an annular shape and includes a distributor floor having a plurality of apertures formed therein for expelling carrier gas therethrough. The flow distributor includes an inner annular wall that defines a porthole in the flow distributor that allows fluid to pass through the flow distributor from the interior volume of the vessel to the outlet conduit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.