Thermal gas sensor, method for measuring the thermal diffusivity of a gas or gas mixture and method for measuring the thermal conductivity of a gas or gas mixture

US11169103B2 · kind B2 · utility

Assignee

• Diehl Metering GmbH · DE

Inventors

• Ulf Hammerschmidt · Braunschweig, DE
• ANDREAS BENKERT · Ansbach, DE
• Christoph Sosna · Nuremberg, DE
• Karl Herrmann · Lenzkirch, DE

Key dates

• Filing date: Oct 16, 2019
• Grant date: Nov 9, 2021
• Expiry date: Jan 24, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N33/0009
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A thermal gas sensor for measuring the thermal diffusivity and/or the thermal conductivity of a gas or gas mixture includes a substrate. In the surface of the substrate a trench is formed, as well as at least two conductor structures arranged at a distance from one another on the surface of the substrate. The conductor structures respectively each contain at least two contact sections and a web section connected to the contact sections, the web sections of the conductor structures crossing over the trench at a distance from one another. At least one slot is formed between at least two contact sections of different conductor structures in at least one region of the surface of the substrate.