Method of depositing electrodes and electrolyte on microelectromechanical system electrochemical sensors
US11169110B2 · kind B2 · utility
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12Claims
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Key dates
| Filing date | Oct 30, 2018 |
| Grant date | Nov 9, 2021 |
| Priority date | — |
| Expiry date | Jun 10, 2039 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/0187
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Embodiments relate generally to systems, devices, and methods for depositing an electrode and an electrolyte on a microelectromechanical system (MEMS) electrochemical sensor. A method may comprise providing a blade on a surface of a substrate; providing a ridge along the perimeter of the substrate; pressing the electrode and the electrolyte onto the blade and the ridge; cutting the electrode into multiple electrodes; positioning the electrolyte to contact the surface, the blade, and the ridge; and positioning the multiple electrodes to contact the surface, the blade, and the ridge.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.