Small gap device system and method of fabrication
US11170984B2 · kind B2 · utility
2Cited by
3References
20Claims
0Family size
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Key dates
| Filing date | Jul 24, 2018 |
| Grant date | Nov 9, 2021 |
| Priority date | — |
| Expiry date | May 13, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J45/00
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A small-gap device system, preferably including two or more electrodes and one or more spacers maintaining a gap between two or more of the electrodes. A spacer for a small-gap device system, preferably including a plurality of legs defining a mesh structure. A method of spacer and/or small-gap device fabrication, preferably including: defining lateral features, depositing spacer material, selectively removing spacer material, separating the spacer from a fabrication substrate, and/or assembling the small-gap device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.