Liquid discharge head and printer
US11173715B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 25, 2020 |
| Grant date | Nov 16, 2021 |
| Priority date | — |
| Expiry date | Mar 25, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/706
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A liquid discharge head includes: a nozzle plate provided with a nozzle hole that discharges a liquid; a silicon substrate provided with a pressure chamber that is connected with the nozzle hole; a diaphragm provided on the silicon substrate; and a piezoelectric element that is provided on the diaphragm and that changes a volume of the pressure chamber, where: the diaphragm includes a zirconium oxide layer; the zirconium oxide layer has (−111) preferred orientation; and in X-ray diffraction of the diaphragm, a difference between a position of (002) peak of the zirconium oxide layer and a position of (220) peak of the silicon substrate is 13.26° or more and 13.30° or less.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.