Physical property value measurement device, physical property value measurement method, and recording medium
US11175249B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 27, 2018 |
| Grant date | Nov 16, 2021 |
| Priority date | — |
| Expiry date | Mar 27, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N25/18
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This physical property value measurement device irradiates a specimen with a heating beam arrived at through intensity-pulse modulation of output light of a heating laser and irradiates the specimen with a temperature probe beam that is output light from a temperature probe laser and is delayed relative to the heating beam. The component of a detection signal for the reflected light of the temperature probe beam that is synchronous with the frequency of the intensity-pulse modulation is amplified using a lock-in amplifier, and a computer that performs regression analysis on the thermoreflectance signal obtained from the lock-in amplifier. A thermophysical property value is determined by using a theoretical formula of a transfer function that is a Laplace transform in relation to time of a response function by single pulse heating to perform regression analysis on Fourier coefficients obtained when the detection signal for the reflected light of the temperature probe beam is expanded into a Fourier series in relation to time.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.