Patent · US Active

Aromatic resins for underlayers

US11175581B2 · kind B2 · utility

0Cited by
5References
12Claims
0Family size

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Key dates

Filing dateNov 2, 2017
Grant dateNov 16, 2021
Priority date—
Expiry dateNov 2, 2037

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/11
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Polyarylene resins and compositions containing them are useful as underlayers in semiconductor manufacturing processes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.