High quality factor transducers for surface acoustic wave devices
US11177791B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 1, 2019 |
| Grant date | Nov 16, 2021 |
| Priority date | — |
| Expiry date | Feb 1, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/6489
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
The present disclosure relates to acoustic wave devices, and particularly to high quality factor (Q) transducers for surface acoustic wave (SAW) devices. An exemplary SAW device includes an interdigital transducer (IDT) between two reflective gratings to form a resonator. The resonator operates through shear horizontal mode acoustic waves, and therefore suppression of transverse modes (parallel to electrode fingers of the IDT) is desired. A piston mode can be formed in the resonator to suppress transverse modes, which may also increase energy leakage and result in a lower Q. A higher Q is achieved by adding a fast region at an end of one or more of the electrode fingers of the IDT.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.