Method of measuring volume of micro projection and method of applying liquid material
US11181362B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 10, 2017 |
| Grant date | Nov 23, 2021 |
| Priority date | — |
| Expiry date | May 8, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/08
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of measuring a volume of a micro projection includes: measuring a three-dimensional shape of the micro projection using white-light interferometry; comparing a height at which a first peak of an envelope of an interference light intensity is detected with a height of a reference plane, and extracting a projection top portion of the micro projection; detecting a height of the extracted projection top portion; detecting a diameter based on a lateral dimension and a longitudinal dimension of a circumscribed quadrangle in an area that constitutes the projection top portion and a region having a height different from the height of the reference plane, the region including or being in contact with the projection top portion; and calculating the volume of the micro projection based on the height of the projection top portion and the diameter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.