Thermoresistive gas sensor

US11181408B2 · kind B2 · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Sebastian Kisban · Munich, DE
• Stefan Klehr · Rheinzabern, DE
• Thomas Neuhauser · Stuttgart, DE
• Piotr Strauch · Prüm, DE
• Jörg Zapf · Munich, DE
• Jürgen Zettner · Veitsbronn, DE
• Stefan VON DOSKY · Karlsruhe, DE

Key dates

• Filing date: Mar 28, 2019
• Grant date: Nov 23, 2021
• Expiry date: Oct 1, 2039

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N30/66
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A thermoresistive gas sensor, e.g. for a flow sensor or a thermal conductivity detector, has a lattice with lattice webs, which consist of a semiconductor material arranged in the plane of the lattice in parallel next to one another, wherein the semiconductor material is formed on a plate-shaped semiconductor substrate that extends over a window-like cutout in the semiconductor substrate and forms the lattice, where the semiconductor layer is doped outside the cutout in areas of two ends of the lattice at least over the width of the lattice until it degenerates and/or bears metallizations, where the semiconductor layer further contains a separation structure insulating the two ends of the lattice from one another, in which the semiconductor material is removed or is not doped, and where the lattice webs extend in an S shape and are connected electrically in parallel to achieve a high measurement sensitivity and mechanical stability.