Process for manufacturing a microbolometer containing vanadium oxide-based sensitive material
US11181424B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 14, 2019 |
| Grant date | Nov 23, 2021 |
| Priority date | — |
| Expiry date | Feb 14, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A process for manufacturing at least one microbolometer comprising a sensitive material based on vanadium oxide containing nitrogen as additional chemical element, includes steps of determining a non-zero effective amount of the additional chemical element starting from which the sensitive material, having undergone a step of exposure to a temperature Tr for a duration Δtr, has an electrical resistivity ρa|r at ambient temperature greater than or equal to 50% of the native value ρa of said sensitive material at ambient temperature; producing the sensitive material in a thin layer having an amount of the additional chemical element greater than or equal to the effective amount determined beforehand, the sensitive material being amorphous and having an electrical resistivity of between 1 and 30 Ω·cm; and exposing the sensitive material to a temperature Tr for a duration Δtr.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.