Wafer prober to facilitate testing of a wafer using nanosecond pulses

US11181572B2 · kind B2 · utility

Assignee

• Lumentum Operations LLC · US

Inventors

• Yuanzhen Zhuang · San Jose, US
• Lucas Morales · San Francisco, US
• Raman Srinivasan · Plano, US
• Sean T. Burns · Columbia, US
• Siu Kwan CHEUNG · San Jose, US
• Tian Shi · Pinole, US
• Tao Li · Savage, US

Key dates

• Filing date: Jun 30, 2020
• Grant date: Nov 23, 2021
• Expiry date: Jun 30, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/2886
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A wafer testing system may comprise a chuck, a wafer carrier, a cathode plate, and a probe card. The chuck may be configured to hold the wafer carrier. The wafer carrier may be configured to hold a wafer on a surface of the wafer carrier, wherein the surface of the wafer carrier comprises one or more contact features protruding from the surface of the wafer carrier. The cathode plate may be configured to provide an electrical connection between the wafer carrier and the probe card, wherein a portion of a surface of the cathode plate is configured to be disposed on the one or more contact features of the wafer carrier. The probe card may be configured to test, using one or more probes associated with the probe card, the wafer when the wafer is on the surface of the wafer carrier.