System for a semiconductor fabrication facility and method for operating the same
US11183409B2 · kind B2 · utility
2Cited by
1References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 28, 2018 |
| Grant date | Nov 23, 2021 |
| Priority date | — |
| Expiry date | Nov 23, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67727
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An automatic cleaning unit for AMHS includes a plurality of sensors disposed on OHT rails. The sensors are configured to define a cleaning zone and to detect a location of an OHT vehicle. The automatic cleaning unit further includes a vacuum generator and a top cleaning part installed over the OHT rails in the cleaning zone. The top cleaning part is coupled to the vacuum generator. The vacuum generator is turned on to perform a vacuum cleaning operation when the sensors detect the OHT vehicle entering the cleaning zone.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.