Patent · US Active

Excimer laser with uniform beam

US11183808B2 · kind B2 · utility

0Cited by

20References

15Claims

0Family size

Assignee

Coherent LaserSystems GmbH & Co. KG · DE

Inventors

Igor Bragin · Göttingen, DE
Timur V. Misyuryaev · Oettingen, DE
Paul Van Der Wilt · Oebisfelde, DE

Key dates

Filing date	Feb 20, 2020
Grant date	Nov 23, 2021
Priority date	—
Expiry date	Feb 20, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH01S2301/20
WIPO fieldOptics
WIPO sectorInstruments

Abstract

Fine-structure in the transverse mode of an excimer laser beam is minimized by having a plurality of resonator mirrors located at each end of a linear excimer laser. At one end, a highly-reflective end mirror and a partially-reflective end mirror are inclined at small angle with respect to each other. At the other end, two output-coupling mirrors are inclined at a small angle with respect to each other. This arrangement of resonator mirrors generates a composite laser beam that blurs any fine structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.