Electrode structures for micro-valves for use in jetting assemblies
US11186084B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 9, 2019 |
| Grant date | Nov 30, 2021 |
| Priority date | — |
| Expiry date | May 9, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/883
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A micro-valve includes an orifice plate including an orifice. The micro-valve further includes an actuating beam having a first end and a second end. The actuating beam also includes a base layer and a layer of piezoelectric material disposed on the base layer, a bottom electrode layer, and a top electrode layer. At an electrical connection portion of the actuating beam, the layer of piezoelectric material includes a first via, and a portion of the top electrode layer disposed within the first via, and a portion of the bottom electrode disposed beneath the first via. The actuating beam includes a base portion extending from the electrical connection portion and a cantilevered portion extending from the base portion. The cantilevered portion is movable in response to application of a differential electrical signal between the bottom electrode layer and the top electrode layer to one of open or close the micro-valve.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.