Systems and methods for operating a MEMS device based on sensed temperature gradients

US11186479B2 · kind B2 · utility

Assignee

• InvenSense, Inc. · US

Inventors

• David deKoninck · Brossard, CA
• Varun Subramaniam Kumar · San Jose, US
• Matthew Julian Thompson · Beaverton, US
• Vadim Tsinker · Belmont, US
• Logeeswaran Veerayah Jayaraman · Milpitas, US
• Sarah Nitzan · Palo Alto, US
• Houri Johari-Galle · Los Gatos, US
• Jongwoo Shin · Pleasanton, US
• Le Jin · Shanghai, CN

Key dates

• Filing date: Aug 21, 2019
• Grant date: Nov 30, 2021
• Expiry date: Jan 3, 2040

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81B2201/0242
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An exemplary microelectromechanical device includes a MEMS layer, portions of which respond to an external force in order to measure the external force. A substrate layer is located below the MEMS layer and an anchor couples the substrate layer and MEMS layer to each other. A plurality of temperature sensors are located within the substrate layer to identify a temperature gradient being experienced by the MEMS device. Compensation is performed or operations of the MEMS device are modified based on temperature gradient.