System and method of measuring warpage of a workpiece on a noncontact support platform
US11187526B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 26, 2020 |
| Grant date | Nov 30, 2021 |
| Priority date | — |
| Expiry date | Feb 28, 2040 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65G2201/022
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
Methods and systems for determination of warpage in a workpiece supported by a non-contact support platform, including a surface with a plurality of pressure ports and a plurality of fluid evacuation ports on the surface, a supply system with a pressure supply connected to the plurality of pressure ports on the surface and configured to supply pressure at a substantially constant level and cause a fluid to flow out of the plurality of pressure ports, so as to support a workpiece by fluid-bearing formed under the workpiece, and at least one flowmeter, coupled to a controller and configured to measure the flowrate at the surface, wherein the workpiece is determined to be warped when the measured flowrate is outside a predefined flowrate range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.