Micro-spectrometry measurement method and system
US11187581B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 23, 2018 |
| Grant date | Nov 30, 2021 |
| Priority date | — |
| Expiry date | Jan 23, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/367
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Disclosed is an optical micro-spectrometry system including an optical microscope, a spectrometry system and an optical system adapted to direct an excitation light beam on the sample through the at least one microscope objective and to collect a Raman or PL light beam from a sample. The optical micro-spectrometry system includes an imaging system configured for acquiring a first image and a second image of the sample, by reflection or transmission of an illumination beam from a sample surface, the first image having a large field of view and the second image having a small field of view, a processing system configured for determining an area in the first image corresponding to the second image, a display system configured for displaying the first image, the second image, and a third image representing the area in overlay on the first image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.