Exposure method and exposure device thereof
US11187996B2 · kind B2 · utility
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14Claims
0Family size
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Key dates
| Filing date | Oct 22, 2018 |
| Grant date | Nov 30, 2021 |
| Priority date | — |
| Expiry date | Nov 18, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/1303
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present application discloses an exposure method and an exposure device thereof. The method includes the following steps: confirming a position of a point to be exposed; capturing and confirming that the point to be exposed is successfully captured; adjusting a light source corresponding to the successfully captured point to be exposed to an adaptive position; and completing an exposure operation by an exposure machine.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.